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The present invention relates to a method of manufacturing a semiconductor device, and more particularly, to a method of manufacturing a semiconductor device having a stacked-gate structure.
2. Description of the Related Art
Semiconductor devices having a stacked-gate structure have been widely used to improve the integration density and the performance of a semiconductor device. For example, in a capacitor, such a stacked-gate structure can improve the capacitance of the capacitor (C) by increasing the surface area of a storage node (SN). Also, in a diode, such a stacked-gate structure can decrease the leakage current of the diode (D), thereby improving the operation characteristics of the device (J. M. Daughton et al., “Advanced Metallization and Processing Techniques for 0.25-.mu.m Electrodes and Silicide,” Extended Abstracts of the 20th International Conference on Solid State Devices and Materials, Tokyo, 1989, pp. 459).
Such a stacked-gate structure is normally formed by forming a charge storing layer on a substrate, and forming a cap layer over the charge storing layer. Then, the charge storing layer is etched by a conventional manufacturing method, and a gate is formed over the charge storing layer. A source and a drain are formed by implanting n-type impurities and p-type impurities into the substrate, respectively.
However, when the charge storing layer is an oxide layer, problems occur in the conventional process for manufacturing a stacked-gate structure. That is, when the oxide layer is etched, a stopper layer (e.g., silicon oxide) is formed between the oxide layer and the cap layer as shown in FIG. 1. The gate formed by etching the oxide layer will be formed to be thinner than the gate of a stacked-gate structure according to a conventional process for manufacturing a stacked-gate structure, as shown in FIGS. 2A to 2B. If such a gate of an undesired thickness is formed, the reliability of the device is poor. Furthermore, the aforementioned problem becomes more serious
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